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FEMTOCHIP succeeds in Tm-doping of thick Al2O3 layers

University of Twente, who is responsible for rare earth doping of the Al2O3 layers in the FEMTOCHIP project, has succeeded in achieving the needed doping levels in thick Al2O3 layers. The upcoming Rutherford Backscattering Spectrometry (RBS) and photoluminescence (PL) measurements will show the concentration level and spectroscopic properties in more detail. Meanwhile, a first impression of the chips can be seen in the image (left), where a white light source is coupled into a Tm3+: Al2O3 spiral waveguide. On the right image, the decrease of propagation losses with the optimization of the sputter deposition process of thick Tm3+: Al2O3 slab waveguides is shown.




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